Please use this identifier to cite or link to this item: https://ndl.ethernet.edu.et/handle/123456789/60500
Title: Principles and Applications of NanoMEMS Physics
Authors: D. Senturia, Stephen
Keywords: Nanoele ctromechanical Systems
Issue Date: 2005
Publisher: Springer
URI: http://10.6.20.12:80/handle/123456789/60500
ISBN: 13 978-0-387-25834-8
Appears in Collections:Physics

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