Please use this identifier to cite or link to this item: https://ndl.ethernet.edu.et/handle/123456789/60500
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dc.contributor.editorD. Senturia, Stephen-
dc.date.accessioned2019-04-05T06:56:30Z-
dc.date.available2019-04-05T06:56:30Z-
dc.date.issued2005-
dc.identifier.isbn13 978-0-387-25834-8-
dc.identifier.urihttp://10.6.20.12:80/handle/123456789/60500-
dc.language.isoenen_US
dc.publisherSpringeren_US
dc.subjectNanoele ctromechanical Systemsen_US
dc.titlePrinciples and Applications of NanoMEMS Physicsen_US
dc.typeBooken_US
Appears in Collections:Physics

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