Please use this identifier to cite or link to this item:
192.168.6.56/handle/123456789/76618
Title: | Electron Kinetics and Applications of Glow Discharges |
Authors: | Kortshagen, Uwe Tsendin, Lev D. |
Keywords: | Electron Kinetics and Applications of Glow Discharges |
Issue Date: | 2002 |
Publisher: | Kluwer Academic |
Description: | This book resulted from the NATO Advanced Research Workshop on “Electron Kinetics and Applications of Glow Discharges,” held in St. Petersburg, Russia, on May 19-23, 1997. Glow discharges have found widespread applications in many technological processes from the manufacture of semiconductors, to recent developments in nano- technology, to the traditional fields of gas lasers, and discharge lamps. Consequently, the interest in the physics of glow discharges has experienced yet another resurgence of interest. |
URI: | http://10.6.20.12:80/handle/123456789/76618 |
ISBN: | 0-306-47076-4 |
Appears in Collections: | Chemistry |
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