Please use this identifier to cite or link to this item: 192.168.6.56/handle/123456789/76618
Title: Electron Kinetics and Applications of Glow Discharges
Authors: Kortshagen, Uwe
Tsendin, Lev D.
Keywords: Electron Kinetics and Applications of Glow Discharges
Issue Date: 2002
Publisher: Kluwer Academic
Description: This book resulted from the NATO Advanced Research Workshop on “Electron Kinetics and Applications of Glow Discharges,” held in St. Petersburg, Russia, on May 19-23, 1997. Glow discharges have found widespread applications in many technological processes from the manufacture of semiconductors, to recent developments in nano- technology, to the traditional fields of gas lasers, and discharge lamps. Consequently, the interest in the physics of glow discharges has experienced yet another resurgence of interest.
URI: http://10.6.20.12:80/handle/123456789/76618
ISBN: 0-306-47076-4
Appears in Collections:Chemistry

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