Please use this identifier to cite or link to this item:
192.168.6.56/handle/123456789/70417| Title: | Atomic Layer Deposition for Semiconductors |
| Authors: | Seong Hwang, Cheol |
| Keywords: | biology |
| Issue Date: | 2013 |
| Publisher: | Springer Science+Business Media New York |
| URI: | http://10.6.20.12:80/handle/123456789/70417 |
| ISBN: | 978-1-4614-8053-2 |
| Appears in Collections: | Biology |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| 2014_Book_AtomicLayerDepositionForSemico.pdf | 8.69 MB | Adobe PDF | View/Open |
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