Title:	Advances in Multiphysics Simulation and Experimental Testing of MEMS
Authors:	Frangi, Attilio Carlo Cercignani Subrata Mukherjee Narayan Aluru
Keywords:	Experimental Testing of MEMS
Issue Date:	2008
Publisher:	Imperial College Press
Description:	Nearly three decades ago, it was uncovered that silicon can be an excellent mechanical material. The excellent electronic properties of silicon combined with the excellent mechanical properties led to revolutionary advances in the development of microelectromechanical technology. Microelectromechanical systems (MEMS) are miniaturized sensors, actuators, devices and systems with a critical dimension of the order of micrometers. Even though many initial concepts for MEMS were based on silicon, a variety of other materials and fabrication techniques have been developed over the last two decades for applications in mechanical, electrical, chemical, biological and other disciplines. MEMS devices such as accelerometers, gyroscopes, high performance mirror displays, pressure sensors, micro motors, micro engines, RF switches, valves, pumps, ultra sensitive membranes, single-chip microfluidic systems such as chemical analyzers or synthesizers, single-chip micro total analysis systems (also referred to as lab-ona-chip) and many more devices and systems have been designed and fabricated over the last one to two decades.
URI:	http://10.6.20.12:80/handle/123456789/53100
ISBN:	978-1-86094-862-6
Appears in Collections:	Archeology and Heritage Management

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