Please use this identifier to cite or link to this item: 192.168.6.56/handle/123456789/44569
Title: Advanced Micro & Nanosystems Volume 1 Enabling Technolog
Authors: O. Brand, H. Baltes,
K. Fedder, Brand, G.
Keywords: MEMS and Nanodevices
Issue Date: 2004
Publisher: WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
URI: http://10.6.20.12:80/handle/123456789/44569
ISBN: 3-527-30746-X
435
Appears in Collections:Chemical Engineering

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