Please use this identifier to cite or link to this item: 192.168.6.56/handle/123456789/44569
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dc.contributor.editorO. Brand, H. Baltes,-
dc.contributor.editorK. Fedder, Brand, G.-
dc.date.accessioned2019-02-18T07:28:02Z-
dc.date.available2019-02-18T07:28:02Z-
dc.date.issued2004-
dc.identifier.isbn3-527-30746-X-
dc.identifier.isbn435en_US
dc.identifier.urihttp://10.6.20.12:80/handle/123456789/44569-
dc.language.isoenen_US
dc.publisherWILEY-VCH Verlag GmbH & Co. KGaA, Weinheimen_US
dc.subjectMEMS and Nanodevicesen_US
dc.titleAdvanced Micro & Nanosystems Volume 1 Enabling Technologen_US
dc.typeBooken_US
Appears in Collections:Chemical Engineering

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