Title:	Ion Beams in Materials Processing and Analysis
Authors:	Schmidt, Bernd
Keywords:	Beams in Materials Processing
Issue Date:	2013
Publisher:	Springer-Verlag Wien
Description:	The main purpose of this book is twofold. On the one hand, it is meant as a compendium for the physical fundamentals of ion–solid interactions, which are important not only for the understanding of ion implantation, ion beam sputtering, ion channeling, ion-induced damage formation, and ion beam mixing, but also for the comprehension of ion beam synthesis, ion-induced phase transformation, and nano- patterning. Therefore, the book addresses both scientists and research engineers. The principles of ion–solid interactions are not only of fundamental importance, but ion beam irradiation of solids is becoming an increasingly important technique for modifying surface and thin film properties. Therefore, this book is also intended to bridge the gap between fundamental phenomena and their technological applications in modern materials research, development, and analysis.
URI:	http://10.6.20.12:80/handle/123456789/40836
ISBN:	978-3-211-99356-9
Appears in Collections:	Building Construction

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