Please use this identifier to cite or link to this item: 192.168.6.56/handle/123456789/40836
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dc.contributor.authorSchmidt, Bernd-
dc.date.accessioned2019-02-06T07:42:28Z-
dc.date.available2019-02-06T07:42:28Z-
dc.date.issued2013-
dc.identifier.isbn978-3-211-99356-9-
dc.identifier.urihttp://10.6.20.12:80/handle/123456789/40836-
dc.descriptionThe main purpose of this book is twofold. On the one hand, it is meant as a compendium for the physical fundamentals of ion–solid interactions, which are important not only for the understanding of ion implantation, ion beam sputtering, ion channeling, ion-induced damage formation, and ion beam mixing, but also for the comprehension of ion beam synthesis, ion-induced phase transformation, and nano- patterning. Therefore, the book addresses both scientists and research engineers. The principles of ion–solid interactions are not only of fundamental importance, but ion beam irradiation of solids is becoming an increasingly important technique for modifying surface and thin film properties. Therefore, this book is also intended to bridge the gap between fundamental phenomena and their technological applications in modern materials research, development, and analysis.en_us
dc.language.isoenen_US
dc.publisherSpringer-Verlag Wienen_US
dc.subjectBeams in Materials Processingen_US
dc.titleIon Beams in Materials Processing and Analysisen_US
dc.typeBooken_US
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