Please use this identifier to cite or link to this item: 192.168.6.56/handle/123456789/35829
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dc.contributor.authorAllen, James J.-
dc.date.accessioned2019-01-17T06:33:24Z-
dc.date.available2019-01-17T06:33:24Z-
dc.date.issued2005-
dc.identifier.isbn0-8247-5824-2-
dc.identifier.isbn463en_US
dc.identifier.urihttp://10.6.20.12:80/handle/123456789/35829-
dc.language.isoenen_US
dc.publisherTaylor & Francis Group, LLCen_US
dc.subjectMicroelectromechanical systemsen_US
dc.subjectDesign and construction.en_US
dc.titleMicro Electro Mechanical System Designen_US
dc.typeBooken_US
Appears in Collections:Electrical and Computer Engineering

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