Please use this identifier to cite or link to this item:
192.168.6.56/handle/123456789/21926| Title: | Chemical Mechanical Polishing in Silicon Processing SEMICONDUCTORS AND SEMIMETALS Volume 63 |
| Authors: | O. Miller, Robert |
| Keywords: | Silicon ;Chemical ;Mechanical |
| Issue Date: | 2000 |
| Publisher: | Academic Press |
| URI: | http://10.6.20.12:80/handle/123456789/21926 |
| ISBN: | 0-12-752172-0 |
| Appears in Collections: | Chemistry |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| Shin Hwa Li.pdf | 13.84 MB | Adobe PDF | View/Open |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.