Please use this identifier to cite or link to this item: 192.168.6.56/handle/123456789/30274
Title: Introduction to Microsystem Technology
Authors: Gerlach, Gerald
Keywords: Microelectromechanical systems
Design and construction
Issue Date: 2006
Publisher: John Wiley & Sons Australia Ltd,
URI: http://10.6.20.12:80/handle/123456789/30274
ISBN: 978-0-470-05861-9
377
Appears in Collections:Electrical and Computer Engineering

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