Please use this identifier to cite or link to this item: 192.168.6.56/handle/123456789/69156
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dc.contributor.editorN. Shunin, Yuri-
dc.date.accessioned2019-05-24T06:22:46Z-
dc.date.available2019-05-24T06:22:46Z-
dc.date.issued2012-
dc.identifier.isbn978-94-007-4119-5-
dc.identifier.urihttp://10.6.20.12:80/handle/123456789/69156-
dc.language.isoenen_US
dc.publisherSpringer-Verlag Berlin Heidelbergen_US
dc.subjectMicroelectronics • Interconnect technology • Low-k materials • Porosityen_US
dc.titleNanodevices and Nanomaterials for Ecological Securityen_US
dc.typeBooken_US
Appears in Collections:Physics

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