Please use this identifier to cite or link to this item: 192.168.6.56/handle/123456789/69156
Title: Nanodevices and Nanomaterials for Ecological Security
Authors: N. Shunin, Yuri
Keywords: Microelectronics • Interconnect technology • Low-k materials • Porosity
Issue Date: 2012
Publisher: Springer-Verlag Berlin Heidelberg
URI: http://10.6.20.12:80/handle/123456789/69156
ISBN: 978-94-007-4119-5
Appears in Collections:Physics

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