Please use this identifier to cite or link to this item: 192.168.6.56/handle/123456789/30274
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dc.contributor.editorGerlach, Gerald-
dc.date.accessioned2018-12-13T06:09:54Z-
dc.date.available2018-12-13T06:09:54Z-
dc.date.issued2006-
dc.identifier.isbn978-0-470-05861-9-
dc.identifier.isbn377en_US
dc.identifier.urihttp://10.6.20.12:80/handle/123456789/30274-
dc.language.isoenen_US
dc.publisherJohn Wiley & Sons Australia Ltd,en_US
dc.subjectMicroelectromechanical systemsen_US
dc.subjectDesign and constructionen_US
dc.titleIntroduction to Microsystem Technologyen_US
dc.typeBooken_US
Appears in Collections:Electrical and Computer Engineering

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